RESIN PIPE

摘要

A resin pipe is provided to preclude effect due to liquid delivered inside such as UPW(Ultrapure Water) and restrict infiltration of chemical solution such as hydrofluoric acid. A resin pipe(10) comprises an inner layer(12) made of fluoro resin, an intermediate layer(14) made of nylon, formed on the inner layer, and an outermost layer(18) made of fluoro resin, formed on the intermediate layer. The fluoro resin of the inner layer equals the fluoro resin of the outermost layer.