SEPARATOR FOR SEPARATING SUBSTRATE

摘要

A unit for separating a substrate is provided to perform structural stability without installation of a lift pin in a central part of a substrate loading bar by installing a suspension bar which connects a plurality of lift pins around the substrate loading bar. A unit(124) for separating a substrate comprises a lift pin holder, a plurality of lift pins, and a suspension bar. The lift pin holder(136) is installed in a lift pin hole(152) of a substrate loading bar(116). The lift pin(132) passes through the lift pin hole of the substrate loading bar. The suspension bar(128) connects a plurality of lift pins, and is suspended in a holding part(130) of the substrate loading bar. A plurality of lift pins and the suspension bar are detachably connected. A width of the suspension bar is more than each diameter of a plurality of lift pins.