METHOD OF DETECTING PARTIAL LOAD FAILURE AND COMPUTER READABLE RECODING MEDIUM FOR THE SAME

摘要

A method for detecting an error of a partial load and a computer readable recording medium for the same are provided to effectively confirm an error of a lamp heater although a chamber is not disassembled. While an output of a power source(100) is changed, a plurality of first state values about a load group is detected in case load groups are normal. While an output of a power source is changed, a plurality of second state values about the load group is detected in case one load among the load groups is error. A reference value is set between a plurality of first state values and a plurality of second state values. A partial error of the load groups is determined by comparing the reference value with a third state value of the load group detected after the output of the power source is applied to the load group. A plurality of first state values and a plurality of second state values are stored as graph or table.