| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pressure control type flow rate reference unit which easily allows performing flow rate calibration of a flow rate control unit on all types of gases, including corrosive gases, at low cost, and which also has superior flow rate control accuracy. <P>SOLUTION: This pressure control type flow rate reference unit is configured of a pressure control unit for adjusting the pressure of a calibration gas from a gas supply source for calibration; a volume provided on the downstream side of a pressure control unit; the connection mouth of an calibration flow rate control unit, provided on the downstream side of the volume; a reference pressure type flow rate control unit connected to a connection hole on the downstream side of the calibration flow rate control unit; a volume provided on the downstream side of a reference pressure type flow rate control unit; and a vacuum pump provided on the downstream side of the volume. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
