| 摘要 |
PROBLEM TO BE SOLVED: To allow a border region to be optically processed at the same level as that of a central portion of a subregion. SOLUTION: This manufacturing method is carried out in such a manner that the position of an optical processing spot E is adjusted according to a pattern of the fluorescence intensity Lp generated from the border region when the optical processing spot E is irradiated onto an adjacent subregion A2 by irradiating a smaller optical processing spot E than each of subregions obtained by dividing a substrate P to be optically processed into a plurality of regions onto one A1 of the subregions and by subsequently carrying out position adjustment so that an end portion of the optical processing spot E is also irradiated onto the border region adjacent to the subregion. Therefore, the same level of the optical processing as that of the central portion of the subregion is carried out for the border regions of the subregions, even if there causes not only substrate displacement but also position variability of the border region due to thermal deformation as well as changes in processing film thickness and composition thereof. COPYRIGHT: (C)2009,JPO&INPIT
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