| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum suction device for conveyance which is thin and lightweight and has superior sucking performance. SOLUTION: The vacuum suction device for conveyance includes a mount portion having a mount surface where a substrate is mounted and made of a ceramic porous body, a frame enclosing the mount portion and made of annular dense ceramics, and a support portion supporting the frame and the mount portion and made of a metal matrix composite material containing ceramics as a reinforcing material, and characterized in that the mount portion and the frame are bonded directly to each other without any gap. The mount portion is not larger than 2 mm in thickness and the total thickness of the vacuum suction device including the mount portion is not larger than 5 mm. COPYRIGHT: (C)2009,JPO&INPIT
|
