发明名称 CHIP PROTECTIVE FILM
摘要 PROBLEM TO BE SOLVED: To provide a chip protective film for preventing the occurrence of chipping when dicing a wafer, and for improving the transverse strength. SOLUTION: The chip protective film includes a curative protective film forming layer 2 in which pencil hardness after curing is≥5H. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009147277(A) 申请公布日期 2009.07.02
申请号 JP20070325974 申请日期 2007.12.18
申请人 FURUKAWA ELECTRIC CO LTD:THE 发明人 YAMAKAWA TAKANORI;MORISHIMA YASUMASA;ISHIWATARI SHINICHI
分类号 H01L21/301;B32B27/38;C09D7/12;C09D109/02;C09D163/00;C09D177/00;C09D201/00;H01L21/683 主分类号 H01L21/301
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