| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope illumination optical system that can change the height of an eyepiece unit, by extending/shortening the optical system of a microscope with a method that will not affect the optical performance. SOLUTION: The microscope illumination optical system includes a collector lens 14 for converting a light ray from the light source 15 into an almost collimated light flux; a field stop 13 provided in the substantially collimated light flux from the collector lens 14; a field lens 7 for converting a light ray from the field stop 13 into an almost collimated light flux; and a condenser lens 5 for collecting the substantially collimated light ray from the field lens 7, on a sample surface 12. The distance between the condenser lens 5 and the field lens 7 is set to be variable. COPYRIGHT: (C)2009,JPO&INPIT
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