| 摘要 |
PROBLEM TO BE SOLVED: To provide pattern forming method and a pattern forming apparatus by which the handleability of a substrate, on which a pattern formed by droplets is drawn, is enhanced to improve a working efficiency. SOLUTION: A green sheet 4G is sucked and fixed to a stage 23 by connecting an air passage S1 to an air suction pump P1 through a solenoid selector valve V1 to make the pressure in the rear surface side of an air permeable porous substrate 24 negative and to diffuse the negative pressure state into the air permeable porous substrate 24 to make the whole rear surface of the green sheet 4G placed on the air permeable porous substrate 24 negative. On the other hand, the green sheet 4G is detached from the stage 23 by connecting the air passage S1 to an accumulation tank T1 through the solenoid selector valve V1 to make the pressure on the rear surface side of the air permeable porous substrate 24 positive and to diffuse the positive pressure state into the air permeable porous substrate 24 to make the whole rear surface of the green sheet 4G placed on the air permeable porous substrate 24 positive. COPYRIGHT: (C)2009,JPO&INPIT
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