| 摘要 |
A remote control power distribution apparatus (RCPDA) includes a power distributor and a cluster tool controller (CTC). The power distributor distributes user power to provide a plurality of required types of power to each of a plurality of device modules including at least one transfer module and a plurality of process modules through a first plurality of power lines, and the user power is provided from an external source through a main power line. The CTC, connected to the power distributor and the device modules, remotely controls the required types of power provided to the device modules in real time by using power line communication (PLC).
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