发明名称 |
METHOD FOR MANUFACTURING AN ULTRA NARROW GAP MAGNETORESISTIVE SENSOR |
摘要 |
A method for manufacturing a magnetoresistive sensor that decreases the stack height of the sensor. The method includes forming a sensor structure having at its top, a Ru layer and a Ta layer over the Ru layer. An annealing process is performed to set the magnetization of the pinned layer of the sensor structure. After the annealing process has been completed and the Ta layer is no longer needed, an ion milling process is performed to remove the Ta layer.
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申请公布号 |
US2009165286(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
US20070966106 |
申请日期 |
2007.12.28 |
申请人 |
HO KUOK SAN;HONG YING;JAYASEKARA WIPUL PEMSIRI;MAURI DANIELE |
发明人 |
HO KUOK SAN;HONG YING;JAYASEKARA WIPUL PEMSIRI;MAURI DANIELE |
分类号 |
G11B5/127 |
主分类号 |
G11B5/127 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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