发明名称 METHOD OF PRODUCING A LEAD ZIRCONIUM TITANATE-BASED SINTERED BODY, LEAD ZIRCONIUM TITANATE-BASED SINTERED BODY, AND LEAD ZIRCONIUM TITANATE-BASED SPUTTERING TARGET
摘要 To obtain a method of producing a high-density lead zirconium titanate-based sintered body having uniform crystalline phases and containing a large amount of PbO, provided is a method of producing a lead zirconium titanate-based sintered body, including: producing a pre-sintered body by sintering raw material powder of lead zirconium titanate having a stoichiometric composition at a temperature of 900° C. or more and 1,200° C. or less; pulverizing the pre-sintered body; producing lead-excessive mixed powder by adding PbO powder to powder obtained by pulverizing the pre-sintered body; and sintering the lead-excessive mixed powder at a temperature lower than the sintering temperature of the pre-sintered body. Because the sintering process is divided into two stages, a high-density (e.g., 95% or more) PZT sintered body constituted only of PZT having a stoichiometric composition in which PbZrO3, PbTiO3, ZrO2, TiO2, PbO, and other intermediate compounds are absent, and excessive PbO can be obtained.
申请公布号 US2009170685(A1) 申请公布日期 2009.07.02
申请号 US20080339227 申请日期 2008.12.19
申请人 ULVAC MATERIALS, INC. 发明人 HASHIGUCHI SHOUICHI;KIM POONG;MIKASHIMA TAKANORI
分类号 C04B35/462 主分类号 C04B35/462
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