| 摘要 |
<p>[PROBLEMS] To solve a problem that the parameter adjustment of semiconductor manufacturing has not been able to be efficiently and speedily performed. [MEANS FOR SOLVING PROBLEMS] An information processing device comprises a target value receiving section (101) for receiving one or more kinds of target values of a semiconductor manufacturing process, a parameter acquiring section (102) for acquiring one or more parameter values at the time of executing the semiconductor manufacturing process, an execution result acquiring section (103) for acquiring one or more kinds of execution results indicating the execution results of the semiconductor manufacturing process, an accumulation section (105) for accumulating the execution results, the target values, and the parameter values in association with one another, a correlation acquiring section (107) for acquiring information on the correlation of the accumulated execution results, target values, and parameter values, an assist information acquiring section (108) for acquiring assist information which is information on a parameter having a high correlation with the target values received by the target value receiving section (101) by using the correlation information acquired by the correlation acquiring section (107), and an output section for outputting the assist information acquired by the assist information acquiring section.</p> |
