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发明名称
Verfahren zur Herstellung einer sublithographischen Kontaktstruktur in einer Speicherzelle
摘要
申请公布号
DE102005001902(B4)
申请公布日期
2009.07.02
申请号
DE200510001902
申请日期
2005.01.14
申请人
QIMONDA AG
发明人
SHUM, DANNY;TILKE, ARMIN
分类号
H01L27/24;G11C16/00;H01L45/00
主分类号
H01L27/24
代理机构
代理人
主权项
地址
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