| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection apparatus that radiates electromagnetic wave to an inspection object, acquires a transmission image or reflection image of an inspection object structure, and non-destructively inspects the inspection object body, structures of different transmittance or reflectivity, and an internal defect. <P>SOLUTION: The electromagnetic wave of about 10 GHz to 1000 GHz (1THz) generated from a diode oscillator such as a TUNNETT diode or the like is fed to a flat antenna capable of selecting an oscillation frequency, a polarization plane or the like to acquire a first resonance, a second resonance is acquired by a hemisphere type dielectric resonator made of high-purity silicon or the like, the intensity of electromagnetic wave radiated is improved by collecting the generated electromagnetic wave, furthermore, the reliability of the inspection is improved by acquiring, as a reference signal, part of the electromagnetic wave before the radiation to the inspection object and canceling the variation of the radiated electromagnetic wave, the reflection of the electromagnetic wave from the inspection object surface is suppressed by arranging an impedance matching film suitable for the inspection object surface on the inspection apparatus side, and the transmission image or reflection image of the inspection object is cleared. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
