发明名称 |
MECHANICAL ISOLATION FOR MEMS DEVICES |
摘要 |
A device according to the present invention includes a MEMS device supported on a first side of a die. A first side of an isolator is attached to the first side of the die. A package is attached to the first side of the isolator, with at least one electrically conductive attachment device attaching the die to the isolator and attaching the isolator to the package. The isolator may include isolation structures and a receptacle.
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申请公布号 |
US2009166827(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
US20070965623 |
申请日期 |
2007.12.27 |
申请人 |
HONEYWELL INTERNATIONAL, INC. |
发明人 |
FOSTER MICHAEL;JAFRI IJAZ;ESKRIDGE MARK;ZHOU SHIFANG |
分类号 |
H01L23/495;H01L21/52 |
主分类号 |
H01L23/495 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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