发明名称 INTERPOLATION OF IRREGULAR DATA IN A FINITE-DIMENSIONAL METRIC SPACE IN LITHOGRAPHIC SIMULATION
摘要 A method, system, and computer program product for preprocessing a pattern in a library of patterns and querying a preprocessed library of patterns are disclosed. Embodiments for querying a preprocessed library of patterns are disclosed for determining a distance between the representation for the first pattern and the representation for the second pattern, determining whether the distance between the representation for the first pattern and the representation for the second pattern is within the range for the first pattern, and transforming the second pattern with the transformation matrix to provide information about the second pattern. Embodiments for preprocessing a pattern in a library of patterns are disclosed for determining a transformation matrix for the first pattern, determining a range for the first pattern, wherein a distance between a representation for a first pattern and a representation for a second pattern is within the range and the second pattern can be transformed with the transformation matrix to provide information about the second pattern, and associating the range and the transformation matrix with the first pattern.
申请公布号 US2009169114(A1) 申请公布日期 2009.07.02
申请号 US20070966920 申请日期 2007.12.28
申请人 CADENCE DESIGN SYSTEMS, INC. 发明人 DODDI SRINI;LEI JUNJIANG;LAY KUANG-HAO;FANG WEIPING
分类号 G06K9/62 主分类号 G06K9/62
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