发明名称 SYSTEM FOR PROCESSING SUBJECT TO BE PROCESSED AND METHOD FOR CONTROLLING THE SYSTEM
摘要 <p>Disclosed is a processing system for performing prescribed processing to a subject to be processed. The processing system is provided with one or a plurality of processors, and a controller for controlling the processors. The controller is configured to be selectively controlled to be in either a stopped state or a standby state when a power supply for the controller is interrupted. In the stopped state, all of a plurality of end devices configuring the processor are stopped, and in the standby state, preparation for processing the subject to be processed is made for a part of or all of the end devices.</p>
申请公布号 WO2009081903(A1) 申请公布日期 2009.07.02
申请号 WO2008JP73314 申请日期 2008.12.22
申请人 TOKYO ELECTRON LIMITED;KOBAYASHI, KENICHI;NAKAYAMA, YOUICHI;SHIKI, KEIICHIRO 发明人 KOBAYASHI, KENICHI;NAKAYAMA, YOUICHI;SHIKI, KEIICHIRO
分类号 H01L21/02;C23C16/44;H01L21/205 主分类号 H01L21/02
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