发明名称 |
SYSTEM FOR PROCESSING SUBJECT TO BE PROCESSED AND METHOD FOR CONTROLLING THE SYSTEM |
摘要 |
<p>Disclosed is a processing system for performing prescribed processing to a subject to be processed. The processing system is provided with one or a plurality of processors, and a controller for controlling the processors. The controller is configured to be selectively controlled to be in either a stopped state or a standby state when a power supply for the controller is interrupted. In the stopped state, all of a plurality of end devices configuring the processor are stopped, and in the standby state, preparation for processing the subject to be processed is made for a part of or all of the end devices.</p> |
申请公布号 |
WO2009081903(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
WO2008JP73314 |
申请日期 |
2008.12.22 |
申请人 |
TOKYO ELECTRON LIMITED;KOBAYASHI, KENICHI;NAKAYAMA, YOUICHI;SHIKI, KEIICHIRO |
发明人 |
KOBAYASHI, KENICHI;NAKAYAMA, YOUICHI;SHIKI, KEIICHIRO |
分类号 |
H01L21/02;C23C16/44;H01L21/205 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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