METHOD AND APPARATUS FOR GROWING SEMICONDUCTOR SINGLE CRYSTAL CAPABLE OF HIGH SPEED PULLING AND COOLING TUBE FOR THE SAME

摘要

A method and an apparatus for growing a single crystalline ingot, and a cooling tube for the same are provided to rapidly deliver a heat emitted in a silicon single crystalline ingot to outside by cooling a cooling pipe through a thermoelement. A thermoelement(102) is bonded to a cooling pipe(100). The cooling pipe surrounds a single crystalline ingot. A thermal history of the single crystalline ingot is controlled by operating the thermoelement during a raising process. A plurality of thermoelements is arranged in different points on the cooling pipe. The thermal history is differently controlled according to a position of the single crystalline ingot by differently controlling a current flowed to each thermoelement. The thermoelement is operated in order to maintain temperature of the cooling pipe.