| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge signal generating apparatus reliably detecting generation errors of edge signals and easily analyzing the causes of errors of the edge signals in a short period of time, and also to provide a semiconductor testing apparatus provided with the apparatus. SOLUTION: The edge signal generating apparatus 1 is provided with: a plurality of down counters 11-14 for performing counting operations for a time corresponding to values of high-order bits of timing data TD; and error detection circuits 31-34 for detecting the presence or absence of generated errors of the edge signals EG on the basis of values of high-order bits of timing data TD newly inputted to the down counters 12, 13, 14, 11 and the relation in size among previous count values C1, C2, C3, C4 of the down counters 11, 12, 13, 14. COPYRIGHT: (C)2009,JPO&INPIT
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