发明名称 |
DIELECTRIC NANOSTRUCTURE AND METHOD FOR ITS MANUFACTURE |
摘要 |
The present invention relates to dielectric nanostructures useful in semiconductor devices and other electronic devices and methods for manufacturing the dielectric nanostructures. The nanostructures generally comprises an array of isolated pillars positioned on a substrate. The methods of the present invention involve using semiconductor technology to manufacture the nanostructures from a mixture of a crosslinkable dielectric material and an amphiphilic block copolymer.
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申请公布号 |
US2009170342(A1) |
申请公布日期 |
2009.07.02 |
申请号 |
US20060499132 |
申请日期 |
2006.08.03 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CO. |
发明人 |
KIM HO-CHEOL;MILLER ROBERT D. |
分类号 |
H01L21/47;H01L23/58 |
主分类号 |
H01L21/47 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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