| 摘要 |
PROBLEM TO BE SOLVED: To provide an in-vacuum welding processing apparatus which can make a vacuum chamber more compact than before. SOLUTION: The in-vacuum welding processing apparatus 1 includes the vacuum chamber 100, a carrier 400 which is disposed in the vacuum chamber 100 and can move in X directions while mounted with a work, a carrier driving means which is disposed outside the vacuum chamber 100, a welding head 300 which is disposed in the vacuum chamber and can move in Y directions, a welding head driving means 540 which is disposed outside the vacuum chamber 400, a Z-directional movable member which is disposed in the welding head 300 and can relatively move in Z directions, a welding roller which is disposed on the Z-directional movable member and welds the work, a first roller driving shaft 600 which is disposed in the vacuum chamber 100 in parallel to the Y directions, a first roller driving shaft driving means 620 which is disposed outside the vacuum chamber 100, and a first conversion means 360 which is disposed in the welding head 300 and converts the power of the first roller driving shaft 600 into Z-directional moving power of the movable member. COPYRIGHT: (C)2009,JPO&INPIT
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