DICING APPARATUS AND DICING METHOD

摘要

A dicing apparatus in one mode of this invention is provided with a work table for placing a work; a machining means for machining the work; a moving means for relatively moving the work table with the machining means; an imaging means which can pick up the image of the work on the work table and the image of the machining means at the same time; an imaging means moving shaft for moving the imaging means; and a control means for controlling the machining means, the moving means, the imaging means and the imaging means moving shaft. The dicing apparatus makes it possible to adjust a blade with the work without machining a dummy work on the test basis, shorten an adjustment time, and improve an operation rate of the device as a whole by reducing cost required for adjustment.