DEVICE FOR MEASUREMENT THICKNESS OF THIN FILM AND APPARATUS FOR DEPOSITING THE THIN FILM USING THE SAME

摘要

A device for measuring the thickness of a thin film and a thin film depositing device using the same are provided to prevent organic compound from depositing on the measuring device. A device for measuring the thickness of a thin film and a thin film depositing device using the same comprise: a light delivery unit(40) installed at a susceptor(30), equipped so that one side end face to rear side of a substrate(G); an optical source(50) radiating the light through the one side end of the light delivery unit; a measuring unit(60) measuring the light-received light at the one side end of the light delivery unit after being reflected with the thin film; and an analysis unit(70) analyzing a value measured by the measuring unit in order to detect the thickness of the thin film deposited on the substrate.