发明名称 CMOS IMAGE SENSOR
摘要 A CMOS image sensor is provided to reduce a charge trap due to a strong electric field between a gate and a source by forming a pinning layer on a high concentration dopant region. A CMOS image sensor includes a source follower(SF), a reset transistor(Rx), and a line selection transistor(LS). In a PPD(Pinned Photo Diode)(17a), a P-type dopant region is doped on an N-type photo diode surface formed inside a substrate(10). A spacer(14) is formed on both side walls of a gate of the reset transistor. A source region and a drain region(16a,16b) are doped as a first concentration inside the substrate of both sides of the reset transistor. A P-type pinning layer(17b) is formed on a bottom surface of the spacer of the source region of the reset transistor.
申请公布号 KR20090072290(A) 申请公布日期 2009.07.02
申请号 KR20070140356 申请日期 2007.12.28
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 HA, MAN LYUN
分类号 H01L27/146 主分类号 H01L27/146
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