发明名称 MAGNET UNIT FOR MANUFACTURING SILICON SINGLE CRYSTAL INGOT AND APPARATUS OF MANUFACTURING SILICON SINGLE CRYSTAL INGOT HAVING THE SAME
摘要 A magnet unit for manufacturing a silicon single crystal ingot and an apparatus for manufacturing a silicon single crystal ingot including the same are provided to precisely control a position of magnetic field applied to a silicon-melted solution by accurately measuring a position of a magnetic field generator. A magnet unit(200) for manufacturing a silicon single crystal ingot is installed in an outer part of a chamber(110) of an apparatus(100) for manufacturing a silicon single crystal ingot. A magnet unit for manufacturing a silicon single crystal ingot applies magnetic field to a silicon-melted solution received in a melting pot(120) of the apparatus for manufacturing a silicon single crystal ingot. A magnetic field generator(210) applies the magnetic field to the silicon-melted solution. A screw(221) is rotatably installed in the chamber. A lifting unit includes a nut(222) which is lifted according to the screw in rotating the screw, and is coupled in the magnetic field generator. A position measuring unit measures a position of the magnetic field generator based on a rotation account of the screw.
申请公布号 KR20090072046(A) 申请公布日期 2009.07.02
申请号 KR20070140019 申请日期 2007.12.28
申请人 SILTRON INC. 发明人 WANG, HAK EUI
分类号 C30B35/00;B28D5/00;C30B15/20 主分类号 C30B35/00
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