| 摘要 |
PROBLEM TO BE SOLVED: To maintain the quality of a processed work piece, and to shorten a tact time of a device. SOLUTION: In a processing apparatus having a processing means performing processing to a work piece, a holding means holding the work piece at a supplying time when supplying the work piece to the processing means and at a recovering time when recovering the work piece from the processing means, a moving means moving the holding means and a cleaning means cleaning the holding means, the cleaning means is disposed in a position of a range other than a movement range at the supplying and recovering time when a range in which the holding means is moved by the moving means at the supplying or recovering time is specified to be the movement range at the supplying and recovering time. COPYRIGHT: (C)2009,JPO&INPIT
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