| 摘要 |
<p>An apparatus for transmitting a wafer cassette and a method of transmitting the wafer cassette are provided to control the height of a cassette by installing a sensor on a gripper arm and using a output of the sensor. A gripper arm(10) catches a cassette carrier, sense horizontal state of a gripper arm, and output a result while a sensor is installed on a creation part of the gripper arm. A controller receives the sensed signal from the sensor and outputs a control signal for determining the slope of an apparatus and maintaining horizontal state of it. A height control device(20) is installed at a lower part of the apparatus and controls the height of the apparatus according to a control signal.</p> |
