发明名称 IMAGE SENSOR AND METHOD FOR MANUFACTURING THEREOF
摘要 An image sensor and a manufacturing method thereof are provided to increase the performance of image sensor by accumulating the additional on-chip circuit. A gate(20) is arranged on a semiconductor substrate(10). An electron storage part(30) is arranged in one side of the gate. A barrier layer(40) is arranged on the surface of semiconductor substrate of the gate other side. A floating diffusion part(50) is arranged at the lower part of the barrier layer. An inter-layer insulating layer(80) is arranged on the semiconductor substrate including the gate. A metal wiring(90) passes through the inter-layer insulating layer and is connected to the electron transport region. A photodiode(110) is arranged on the inter-layer insulating layer including the metal wiring and is connected to the metal wiring.
申请公布号 KR20090071218(A) 申请公布日期 2009.07.01
申请号 KR20070139450 申请日期 2007.12.27
申请人 DONGBU HITEK CO., LTD. 发明人 KIM, JONG MAN
分类号 H01L27/146 主分类号 H01L27/146
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