发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are provided to prevent the generation of a leakage current between a gate and a source and drain region by preventing the loss of poly-oxide although the misalignment is generated. An LCD region, a source region and a channel region(36) and a drain region are formed on an active region. The gate oxidation film and polygate(38) are formed on the channel region. The gate oxide film and polygate are covered with a sidewall pattern(42). The linear nitride layer(60) is formed on the substrate. The pre-metal dielectric layer(70) is formed on the linear nitride layer. A plug is formed by selectively removing the pre-metal dielectric layer and linear nitride layer.
申请公布号 KR20090069533(A) 申请公布日期 2009.07.01
申请号 KR20070137231 申请日期 2007.12.26
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, CHANG EUN
分类号 H01L21/336 主分类号 H01L21/336
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