发明名称 Abrasive member and method for the resurfacing of a lapping plate
摘要 <p>A lapping machine includes a lapping plate (1), and a workpiece carrier (4) with a workpiece-holding hole (5) disposed on the plate (1), a workpiece (6) being fitted within the hole in the carrier. The workpiece (6) is lapped while the plate and the carrier are individually rotated and loose abrasive grains (7) are fed onto the plate. A synthetic resin-based elastic abrasive member (10) having a Rockwell hardness (HRS) in the range of -30 to -100 is effective for resurfacing the lapping plate (1).</p>
申请公布号 EP1762338(B1) 申请公布日期 2009.07.01
申请号 EP20060254695 申请日期 2006.09.08
申请人 SHINANO ELECTRIC REFINING CO., LTD. 发明人 YASUOKA, KAI;KAZAMA, KENICHI;TSUNEYA, AYUMI;SATO, SHUNJI
分类号 B24B53/013;B24B53/017;B24B53/12;B24D3/32;H01L21/304 主分类号 B24B53/013
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