BRUSH UNIT AND APPARATUS FOR CLEANING SUBSTRATE USING THE SAME

摘要

A brush cleaning unit and a substrate cleaning device are provided to increase cleaning efficiency of a substrate by minimizing the eccentricity of a rotating brush. A brush cleaning unit includes a brush shaft and a brush assembly(430). The brush assemblies are detachably installed in a plurality of points on the circumferential surface of the brush shaft. The brush assemblies clean the object. The brush assemblies are installed along the circumferential direction and the length direction of the brush shaft on the circumferential surface of the brush shaft. The brush assemblies are installed in the circumferential surface of the brush shaft. The brush assemblies include a connection member(432) and a brush member(434).