| 摘要 |
An excimer lamp of flat type and tube type, and manufacturing method thereof are provided to improve the optical power and efficiency by using a high light coupling structure. The spacer(30) is interposed between the rear portion(10) and front portion(20). The rear side electrode(14) is formed on the backplane substrate(12). The rear side induction electrode(15) is formed in the lower part of the backplane substrate. The nanoporous dielectric of a thickness is formed on the top of the rear side electrode. The ultraviolet radiation(18) is formed on the top of the nanoporous dielectric(16). The front side electrode(24) is formed on the top of the ultraviolet ray transparent dielectric(22).
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