发明名称 CMOS IMAGE SENSOR AND METHOD OF MANUFACTURING THEREOF
摘要 A CMOS image sensor and a method for manufacturing the same are provided to penetrate hydrogen for hydrogen sinter by performing hydrogen annealing on the whole surface before forming an optical shielding layer. At least one photo diode(10) and a transistor(20) are formed on a semiconductor substrate. An interlayer insulating layer including at least one metal wiring(30,40,50) is formed on the semiconductor substrate including the photo diode and the transistor. A first insulating layer(60) is formed on the interlayer insulating layer. A second insulating layer(80) is formed on the first insulating layer. The hydrogen annealing is performed on a front surface of the semiconductor substrate where the second insulating layer is formed, for the hydrogen sinter of the photo diode and the transistor. The optical shielding layer is formed on the second insulating layer after the hydrogen annealing.
申请公布号 KR20090070446(A) 申请公布日期 2009.07.01
申请号 KR20070138462 申请日期 2007.12.27
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, SANG GI
分类号 H01L27/146 主分类号 H01L27/146
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