| 摘要 |
A metal insulator metal capacitor and manufacturing method of metal insulator metal capacitor are provided to increase capacitance by extending the cross section between a dielectric and a metal material. The dielectric layer pattern(120) is formed on the lower metal wiring layer(110). The trench(124) is formed in the upper side of the dielectric layer pattern. The metal three layer pattern is formed on the dielectric layer pattern. The insulating layer is formed on the lower metal wiring layer, and the dielectric layer pattern and metal three layer pattern. The trench can be formed like a wine glass shape.
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