COMPOSITE SENSOR AND ACCELERATION SENSOR

摘要

A first vibrator 4 is provided on a surface of a substrate 2 such that the vibrator 4 can vibrate in an X-axis direction. An angular-velocity-detecting vibrator 6 is provided inside the first vibrator 4 such that the vibrator 6 can be displaced in a Y-axis direction. A vibration generating unit 8 and a vibration monitor unit 20 are provided between the substrate 2 and the first vibrator 4. An angular-velocity-detecting displacement detecting unit 11 is provided between the substrate 2 and the angular-velocity-detecting vibrator 6. A second vibrator 15 is provided outside the first vibrator 4 such that the vibrator 15 can be displaced in the Y-axis direction. An acceleration-detecting displacement detecting unit 17 is provided between the first and second vibrators 4 and 15. An angular velocity detecting circuit 27 detects angular velocity by performing synchronous detection on a displacement detection signal Vc from the displacement detecting unit 11 by using a monitor signal Vm from the vibration monitor unit 20. On the other hand, an acceleration detecting circuit 31 detects acceleration by performing synchronous detection on a displacement detection signal Va from the displacement detecting unit 17 by using a monitor signal Vm from the vibration monitor unit 20.