| 摘要 |
A multi loop core dual plasma reactor is provided to generate the plasma with a large area uniformly by including a multi laser scanning line and a multi loop core plasma generator. A first multi loop core plasma generator(10) includes a first multi loop core, a first core protective tube and a plurality of primary wire coils. The first multi loop core crosses the inside of the body of a first reactor. The first core protective tube protects the first multi loop core. The plurality of primary wire coils are wound around the first multi loop core. A second multi loop core plasma generator(15) includes a second multi loop core, a second core protective tube, and the plurality of primary wire coils. A main power supply source supplies the wireless frequency power source to the primary wire coil of the first and second multi loop core plasma generators. A laser supply source(80) comprises a multi laser scanning line consisting of a plurality of laser scanning lines inside the first and the second reactor. |
