发明名称 METHOD FOR MAMUFACTURING A ALUMINA COMPLEX CAPILLARY FOR SEMICONDUCTOR WIRE BONDING AND ALUMINA COMPLEX CAPILLARY FOR SEMICONDUCTOR WIRE BONDING USING THEREOF
摘要 A method for manufacturing an alumina complex capillary for a semiconductor wire bonding and the alumina complex capillary are provided to improve a bonding by obtaining a product having a wire bonding alumina and a complex capillary. A fine alumina powder is made of an alumina powder 90.0 weight% to 97.0 weight%, a zirconia powder 1.0 weight% to 8.0 weight%, 85 weight%, an ethylene resin group 5 weight% to 20 weight%, wax type 3 weight% to 10 weight% is formed(S10), a chrome oxide powder 0.5 weight% to 3 weight%. A molding product of the capillary shape is shaped as the formed slurry(S20), and the capillary molding product from which the binder is removed successively is heated by a temperature of 950°C to 1550°C.
申请公布号 KR20090069887(A) 申请公布日期 2009.07.01
申请号 KR20070137706 申请日期 2007.12.26
申请人 BI EMT CO., LTD. 发明人 LEE, KANG YOUL;KIM, HEE SEUNG;SEO, MI YOUNG
分类号 H01L21/60 主分类号 H01L21/60
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