| 摘要 |
A vacuum system, and a method of controlling the pressure of vacuum chamber and a vacuum processing system are provided to use even in case the power supply stops with the power outage by controlling the opening and shutting of the first switching tool by using the first control gas. A gate valve(7b) is operated by the operation gas supplied from a gas source. A vacuum chamber is maintained into the vacuum condition by the gate valve. A through hole(107) is formed in the wall of the vacuum chamber in order to introduce the outside gas within the vacuum chamber. One end side of piping(111) is connected to the through hole. A vacuum leaking port(109) is formed at the other end side of piping. An air piping(115) for control is connected to the air operator valve(113). Opening and shutting of the air operator valve are controlled by the first control air.
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