ROBOT AND METHOD FOR REVERSING A SUBSTRATE, UNIT FOR REVERSING A SUBSTRATE AND APPARATUS FOR TREATING A SUBSTRATE WITH THE ROBOT

摘要

A substrate reversing robot, an apparatus and a method for reversing a substrate and a substrate processing device are provided to minimize a time of a substrate process by reversing a plurality of substrates rapidly. A hand has a first surface(242a) supporting a substrate and a second surface(242b) which supports a substrate and is positioned in a side opposite to the second surface. The rotating member rotates the hand so that the position of the first surface and the position of the second surface are reversed. The fixing member fixes the first surface and the second surface in the substrate. Respective holes are formed in the first surface and the second surface. The fixing member includes a vacuum member applying the vacuum to the vacuum hole on the first surface and the vacuum hole on the second surface. The vacuum member includes a first vacuum line and a second vacuum line.