| 摘要 |
A remote control power distribution apparatus and a power distribution system of a semiconductor device including the same are provided to control monitoring of a power system and maintenance/repair of a semiconductor device system through a power line communication and software program. A remote control power distribution apparatus includes a power distributor(10) and a CTC(Cluster Tool Controller)(20). The power distributor supplies a required power to a plurality of device modules(31,33,35) by distributing a user power. A plurality of device modules includes at least one or more transfer modules and a plurality of processing modules. The CTC is connected to the power distributor and a plurality of device modules. The CTC controls a required power supplied to a plurality of device modules from the power distributor through a power line communication on a real time. The power distributor includes a first power line communication modem(15). The CTC includes a second power line communication modem(25).
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