ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE

摘要

An electrostatic chuck and substrate temperature adjustment-fixing equipment are provided to reduce the particle adhered to the opposite side of substrate. A substrate(17) is fixed on an upper side of plural projections(12c) in the absorption state. The temperature of substrate is adjusted by the heater installed at a base plate(16) or a waterway(14). The apparatus for controlling the gas pressure injects the inactive gas from a plurality of gas inlets(18a) to a gas furnace(18). The injected inactive gas is ejected from a gas discharge portion(18b) and is formed between the lower side of substrate and the upper side(12a) of base body(12). The outer side seal ring prevents the inactive gas from being leaked out to the outside of gas packing part(19).