发明名称 PROTECTIVE FILM COATING DEVICE
摘要 A protective layer coating apparatus is provided to prevent the laser treatment at the state that a protective layer is not coated. The protective layer coating apparatus comprises a protective layer check unit(75). The protective layer check unit is made of light directing unit(76), a detection unit(77), and a notification unit(78). The light directing unit is made of an ultraviolet light LED(761), a half mirror(762), and an ultraviolet light ring light(763). The detection unit is made of a camera(772) and a controller(773). A controller comprises an operation unit(775) and a decision unit(776). The controller controls the operation of the light directing unit. The notification unit uses the display unit.
申请公布号 KR20090071364(A) 申请公布日期 2009.07.01
申请号 KR20080114292 申请日期 2008.11.17
申请人 DISCO CORPORATION 发明人 HIGAKI TAKEHIKO
分类号 H01L21/208 主分类号 H01L21/208
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