METHOD AND APPARATUS FOR PROVIDING A CHEMICAL

摘要

A method and an apparatus for providing a chemical are provided to discharge chemical while keeping the pressure of the chemical by controlling a driving unit to adjust the detected pressure of the chemical. A method and an apparatus for providing a chemical are comprised of the steps: chemical for an integrate circuit device is stored in the storage chamber(S10); the stored chemical is compressed through a driving unit(S20); the pressure of the chemical is sensed by a pressure sensor(S30); and the pressure of the chemical is adjusted to a predetermined pressure if the pressure of the chemical is different from the predetermined pressure(S40).