发明名称 IMAGE SENSOR AND METHOD FOR MANUFACTURING THEREOF
摘要 An image sensor and a manufacturing method thereof are provided to improve the productivity of device by omitting the upper wiring process for applying the ground voltage to the photodiode. A readout circuit(120) is formed in a semiconductor substrate(100). A wiring(150) and an interlayer dielectric layer(160) are formed in the semiconductor substrate in order to be connected with the readout circuit. Photodiode patterns(205) are arranged on the interlayer dielectric layer in order to be connected to the wiring. The gap region divides the photodiode patterns into the pixel. A pixel separation layer(230) is arranged on the interlayer dielectric layer. A trench(235) is formed in the pixel separation layer. A contact line(245) is formed in the trench.
申请公布号 KR20090071334(A) 申请公布日期 2009.07.01
申请号 KR20080076004 申请日期 2008.08.04
申请人 DONGBU HITEK CO., LTD. 发明人 LIM, GUN HYUK
分类号 H01L27/146 主分类号 H01L27/146
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