| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a process monitoring method for accurately deciding the condition of a process based on a plurality of mutually correlative process data without receiving the influence of the change of the operation conditions of a process. <P>SOLUTION: This process monitoring method comprises a process 4 for collecting a plurality of process data, a process 7 for dividing the collected plurality of process data into external variables directly showing the change of operation conditions and main variables being the other variables, and for removing the influence of the external variables on the main variables, a process 8 for converting new variables acquired by removing the influence of the external variables on the main variables into statistic by multi-variate statistical analysis and a process 10 for deciding the condition of the process by comparing the converted statistic with a preliminarily set threshold. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
