| 摘要 |
A terminal cleaning apparatus integrated to an assembling apparatus for integrating a display panel by bonding an electronic part to an externally connecting terminal of a substrate in which substrates 5 respectively held by a first substrate holding portion 24 and a second substrate holding portion 25 moved by an XY table mechanism 23 are made to pass through a first cleaning portion 21 and a second cleaning portion 22 having different cleaning means to simultaneously clean and the substrate which is not cleaned is carried in and the substrate 5 is transferred between the substrate holding portions and the substrate 5 which has been cleaned is carried out simultaneously by a first substrate transferring mechanism 26. Thereby, an operational efficiency of a step of cleaning an externally connecting terminal can be improved by making substrate carrying operation efficient. |
