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发明名称
图案化基板之最佳清洁设备与方法
摘要
本发明提供用以清洁晶圆表面之设备与方法,特别针对图案化晶圆的清洁。该清洁设备包括一具有在面朝图案化晶圆的表面上之通道的清洁头,该图案化晶圆具有一主要图案。通道中流动的清洁材料在图案化晶圆表面上施加一剪力,该图案化晶圆定向为相对于该清洁头之一特定定位。图案化晶圆与清洁头之间的剪力及特定定位改善了表面污染物移除效率。
申请公布号
TW200929343
申请公布日期
2009.07.01
申请号
TW097139858
申请日期
2008.10.17
申请人
兰姆研究公司
发明人
德赖瑞厄斯 约翰M;弗利尔 艾瑞克M;瑞夫肯 麦可;马克思 杰弗瑞
分类号
H01L21/30(2006.01)
主分类号
H01L21/30(2006.01)
代理机构
代理人
许峻荣
主权项
地址
美国
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