MANUFACTURING APPARATUS OF LIQUID CRYSTAL DISPAY DEVICE AND MANUFACTURING METHOD USING THE SAME

摘要

A manufacturing device of a liquid crystal display shortening the firming time of a photosensitive material coated substrate or the resinous material and a manufacturing method using the same are provided to generate heat by activating the molecule of the photosensitive material coated the top of the substrate or the resinous material. A chamber receives a plurality of substrates(110) in which the resinous material for the photosensitive material for the color filter formation or the pattern formation is coated on a surface. The heating heater heats the inside of chamber. The heat radiating plate delivers the heat generated from the heating heater to the inside of chamber. A discharge pipe discharges gas and polluted material of the inside of chamber. A cabinet sets up each of a plurality of substrates. A microwave generating device irradiates microwave in the substrate which cabinet has.