| 摘要 |
A test pattern for analyzing capacitance characterization of interconnection line is provided to accurately analyze the connection wiring capacitance by extracting a parasitic component of a connection wiring and a pad. The first switching terminal(40a) and the first probe pad(30a) are combined with both ends of the first metal line(20a). The first switching terminal is combined with the end of the second metal line(20b). The second switching terminal(40b) is combined with the end of the third metal line(20c). The second switching terminal and the second probe pad(30b) are combined with both ends of the fourth metal line(20d). The first switching terminal and the second switching terminal are operated at the same time.
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